摘要
研究了大气状态下应用扫描隧道显微镜(STM)对金薄膜和单晶硅材料进行了纳米级电场加工实验。分析了针尖和样品表面的相互作用机理,以及隧道间隙、隧道电流反馈、脉冲个数等因素对纳米点结构的加工产生的影响,并探讨了针尖磨损对纳米结构一致性的影响。
The nano dots fabrication tests of Au film and single-crystal silicon were performed in air using scanning tunneling microscope(STM).The interaction mechanism between the tip and sample were investigated,and the influence of tunneling tap,tunneling current feed-back and pulse amount on the nano-fabrication process were studied.How the tip wear works on the nano dots' consistency during the process was discussed.
出处
《航空精密制造技术》
2007年第4期5-8,共4页
Aviation Precision Manufacturing Technology
基金
国家自然科学基金资助项目(50375040)
关键词
纳米加工
STM
隧道间隙
磨损
nano-fabrication
scanning tunneling microscope
tunneling gap
wear
