摘要
从内在因素(迟滞和蠕变效应)和外在因素(环境、控制电源、预紧力、导向机构等)两大方面系统的总结了压电驱动微位移灵敏度的影响因素,并针对每种因素给出了相应的实验结果或调研数据,提出了提高分辨率可采取的措施。
Key factors for micro-displacement resolution of piezoelectric actuators are systematically summarized in following two aspects: intrinsic(hysteresis;creep deformation) and extrinsic(environment;control power;pretightening force;guide mechanism etc.).Considering each factor,some valuable experimental and technical solution to improve the micro-displacement resolution were illustrated.
出处
《航空精密制造技术》
2007年第4期24-27,共4页
Aviation Precision Manufacturing Technology
关键词
压电驱动
微位移灵敏度
迟滞
蠕变
piezoelectric actuators
micro-displacement resolution
hysteresis
creep deformation
