微楔形镜加工技术研究

Manufacture technology for micro-wedge mirror

微楔形镜的加工不能像平行平面元件那样,采用大块抛光,切片分割的办法。针对零件尺寸小、精度要求高的特点,研究了加工过程中的粘结上盘、面形精度控制和楔形角检测等技术,设计了吸附式粘结上盘和楔形角测量等专用装置,应用于尺寸为3×3×1mm(6°)的Nd∶YVO4(掺钕钒酸钇)晶体批量生产中,提高了零件的面形精度和加工可靠性。测试结果表明:面形精度优于λ/10(λ=632.8nm),表面光洁度达0/0级,楔形角合格率达98%以上。

Bulk optical polishing and segmenting manufacture method which is usually used for parallel plane elements,is not suited for micro-wedge mirrors.Plate bonding,surface shape controlling and wedge angle measuring technique are presented in this paper to achieve small size and high precision.Several devices used for adsorbing plate bonding and measuring wedge angle have been designed.The technique have been used in batch production of Nd∶YVO4 crystal micro-wedge mirrors in size of 3mm×3mm×1mm and wedge angle of 6°.The surface shape and manufacture reliability of Nd:YVO4 crystal micro-wedge mirrors are also improved greatly.It has been shown by test results that the surface shape precision is better than λ/10(λ=632.8nm),surface roughness is up to Grade 0/0 and the percent of pass exceeds 98%.