摘要
A theoretical and computational model is presented to study the ionization of the argon electron cyclotron resonance(ECR)microwave discharge using a quasi-three-dimensional electromagnetic particle-in- cell plus Monte Carlo collision method.The interaction between the charged particles and microwave fields are described by the electromagnetic mode of particle-in-cell method.The collision processes are treated with Monte Carlo method.The simulation code is the original work.The results of the particle simulation for the ECR discharge of argon gas which include the microscopic features of charged particles and the electromagnetic characteristics of the ECR discharge plasma,and also the transient phenomena have been presented.
A theoretical and computational model is presented to study the ionization of the argon electron cyclotron resonance(ECR)microwave discharge using a quasi-three-dimensional electromagnetic particle-in- cell plus Monte Carlo collision method.The interaction between the charged particles and microwave fields are described by the electromagnetic mode of particle-in-cell method.The collision processes are treated with Monte Carlo method.The simulation code is the original work.The results of the particle simulation for the ECR discharge of argon gas which include the microscopic features of charged particles and the electromagnetic characteristics of the ECR discharge plasma,and also the transient phenomena have been presented.
