摘要
在激光干涉仪的微纳米加工过程中,着重分析了随着外界环境因素诸如大气压强、温度、相对湿度的变化而引起的测量结果的改变,进而分析对加工结果产生的影响。
Evaluation the factors effected on the dualchanel laser interferometer precise measurement in micromanufacture, emphasizing on the measured value changed with the atmosphere pressure, temperature, humidity, which would greatly work on the results of the micromanufature.
出处
《航空精密制造技术》
2007年第5期6-9,共4页
Aviation Precision Manufacturing Technology
关键词
微纳加工
双频激光干涉仪
大气压强
温度
湿度
micromanufacture
dualchanel laser interferometer
atmosphere pressure
temperature
humidity
