摘要
研制了一台由压电陶瓷驱动、Y向微调对刀装置及夹紧汽缸组成的X-Z二维精密微动刀架,并建立了微动刀架的数学模型。经实验测试刀架分辨率达到5nm,重复定位精度达到±0.01μm,满足超精密加工的要求。
A two dimensions micro-feed stage driven by piezoelectric actuators was developed,tool height adjustment in Y direction and cylinder clamps.The results of experiments shows that the displacement resolution of the micro-feed tool post is 5nm,the relocation accuracy gets to ±0.01μm,which meets the requirements of ultra-precision machining.
出处
《航空精密制造技术》
2006年第4期7-10,共4页
Aviation Precision Manufacturing Technology
关键词
微动刀架
压电陶瓷
超精密加工
micro-feed tool post
piezoelectric actuator
ultra-precision machining
