摘要
In wavelength division multiplexing (WDM) systems, arrayed waveguide grating (AWG) multiplexer is a key component. Polymeric AWG multiplexer has recently attracted much attention due to its low cost processing and a potential of integration with other devices. Fluorinated polyether ether ketone (FPEEK) is excellent material for fabrication of optical waveguides due to its low absorption loss at 1.55-μm wavelength and high thermal stability. A 32-channel AWG multiplexer has been designed based on the grating diffraction theory and fabricated using newly synthesized FPEEK. During the fabrication process of the polymer/Si AWG device, spin coating, vaporizing, photolithographic patterning and reactive ion etching (RIE) are used. The AWG multiplexer measurement system is based on a tunable semiconductor laser, an infrared camera and a Peltier-type heater. The device exhibits a wavelength channel spacing of 0.8 nm and a center wavelength of 1548 nm at room temperature.
In wavelength division multiplexing (WDM) systems, arrayed waveguide grating (AWG) multiplexer is a key component. Polymeric AWG multiplexer has recently attracted much attention due to its low cost processing and a potential of integration with other devices. Fluorinated polyether ether ketone (FPEEK) is excellent material for fabrication of optical waveguides due to its low absorption loss at 1.55-μm wavelength and high thermal stability. A 32-channel AWG multiplexer has been designed based on the grating diffraction theory and fabricated using newly synthesized FPEEK. During the fabrication process of the polymer/Si AWG device, spin coating, vaporizing, photolithographic patterning and reactive ion etching (RIE) are used. The AWG multiplexer measurement system is based on a tunable semiconductor laser, an infrared camera and a Peltier-type heater. The device exhibits a wavelength channel spacing of 0.8 nm and a center wavelength of 1548 nm at room temperature.
基金
This work was financially supported by the Science & Technology Council of China (No. TG2000036602 and 2001AA312160)
