激光基准在机床工作台误差自动校正中的应用

The Application of Laser Beam Datum in Error Autorctification of MachineTool Working Table

本文提出了一种以激光为基准机床运动误差自动校正技术。为了对激光束进行准直，利用光纤和半导体激光调制技术，形成激光束准直系统，使用四象限探测器接收激光束，可以消除杂散光、激光束漂移的影响。以准直后的漱光束为基准，四象限探测器在线探测机床工作台直线运动误差，然后利用反馈系统驱动压电晶体自动校正误差，实现误差自动补偿。

In this paper, the autorectifing technology for straight movement errors of machine tool by using laser beam datum is proposed. In order to collimate the laser beam, we use optical fibre and semiconduolor laser modulating to form laser beam datum system. A four-quadrant detctor is used to receive the laser beam, which can eliminate the effects of Veiling glare and the drift of laser beam. when the collimated laser beam is taken as datum, the straight movement errors of the working table of machine tool are detected on line by the four quadrant detector, then the autorectification of the errors is realized by using a feedback system to drive the piezoelectric crystal.