平面形状误差分离方法的比较分析

Comparison and Analysis on Ten Error Separation Methods of Flat Form Error

就十种典型的精密平面形状误差测量-分离方法的权函数及其零点,作了分析比较。按形状误差谐波抑制最小准则,论证了五点式正交逐次三点法、九点式正交逐次三点法、复合三点法、不对称二维混合法和不对称四点法优于其他方法,不对称四点法则较为理想。

This paper presents ten typical measurement separation methods for flat form error. The weight functions and zero points of these methods are analyzed and compared with each other. It is proved that the orthogonal sequential three point with 5 points, the orthogonal sequential three point with 9 Points, the three point compound method, the asymmetric four point method and the asymmetric 2 D mixed method are superior to the others with respect to the criterion of minimizing harmonic losses. The asymmetric four point method performs better flatness error separation than the others.[