一种用计量光栅实现2nm测量分辨率的新方法

A New Grating-based Metrology Method to Achieve Nanometer-order Resolution

提出一种利用正切函数在零点附近的小范围内线性度非常好的特点，对计量光栅技术中计算机正切细分法进行扩展，在信号处理电路中设计出一个量程比较小的精测档，以获得更高的纳米级的测量分辨率的新方法，并进行了详细充分的实验验证。

A new grating-based metrology method, which takes advantages of the good linearity of tangent function in small range around datum point is proposed in this paper. As a result, the measuring resolution of2nm is achieved with the improved the discrimination power of Computer Tangent Subdivision (CTS) method used in metrological grating technology, and the designed smaller precision measuring range in signal processing circuit.