柔性八杆对称联动定位机构及系统的研究

A Study on Flexure Eight－bars Symmetric Linkage Nanopositioning Mechanism and Its System

以柔性铰链为弹性导轨、压电陶瓷为驱动器，提出了一种新颖的纳米级柔性八杆对称联动定位机构，给出了其刚度公式和动力学模型，结合激光干涉仪微位移检测装置，设计并研制了微机控制的数字闭环控制纳米定位系统。实验表明：该纳米定位系统行程 10μ m，定位精度优于± 0.03μ m，定位分辨率 3nm，最大定位时间 40ms。

This paper presents a novel flexure- hinge- guided, piezoelectric ceramic(PZT)- actuator- driven flexure eight- bar symmetric linkage nano- positioning mechanism. The formula of rigidity and kinetic model of the mechanism are also given. Furthermore, a computer- controlled digital closed- loop control nano- positioning system is developed with the laser interferometer used as micro- displacement detecting device. The experiment shows that the positioning accuracy of the nano- positioning system is better than± 0.03μ m within 10μ m range, with a positioning resolution of 3nm and the maximum positioning time of 40ms.