纳米级显微硬度试验研究

Study on Micro-hardness Testing of Material in Nanometer Scale

阐述了一种纳米尺度下测试材料显微硬度的试验方法——深度硬度试验法。并研制了深度硬度试验装置，采用压电陶瓷传感器实现微位移和激光测试超低载荷，该试验装置分辨率高，可以实现纳米级压痕的显微硬度测试。

This paper presents a micro-hardness testing method, namely depth-hardness testing with nanometer scale. As a study result, the authors develop a new micro-hardness testing device, which employs piezoelectric actuators to perform the micro feeding and laser meter to test the ultra-low load, featuring high resolution and micro hardness testing with indentation of nanometer scale.