微镜单元的设计与加工工艺研究

Research on Design and Fabrication Process of Micromirror Cell

详细介绍了微光学电子机械系统MOEMS领域的用于光学信号调制的微镜单元，分析了该微镜单元的工作原理及结构，推导了动态方程的有关参数，给出了仿真结果。首次提出了该结构前两阶频率的表达式，并与相应的有限元模态分析结果进行了比较。本文还对微镜的加工工艺作了简要介绍。

A new type of component used in the field of MOEMS for optical signal modulation, called micro-mirror cell, is presened in this paper. Moreover, the function principle and structure of the cell is described, the dynamic equation parameters are derived and the simulation result is shown. Significantly, the former two-class nature frequency expressions for the micro-mirror cell structure are put forward for the first tine, which are compared with the results from FEM analysis. Also, the micro-mirror manufactlering forocess is briefly introduced in this paper.