轻拍式探针和光杠杆

Tapping Stylus and Optical Lever

本文首先由理论分析导出薄片压电陶瓷激振的悬臂式轻拍探针振幅─—频率表示式．该公式为振幅、相位或频率测量的轻拍式探针用于待测表面瞄准（或定位）技术提供理论依据．同时，在上述理论分析基础上作了大量实验，从获得的数据中，一方面验证理论分析的适用范围，另外也提出了最佳定位点的存在以及它的判别方法．

In this paper it is not only deduced by theoretical analysis that some equations refer to amplitude and frequency for a cantilever which is oscillated by two thin piezo-ceramic plates but also it provides the principle for taking aim of a sample surface or positioning it by usingthis tapping stylus.