Sputtering of W Mo alloy under ion bombardment

The distribution of plasma density in the vicinity of the W Mo alloy source in the process of double glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface composition and morphological variation of the W Mo alloy source was studied. The experimental results show that there exists obvious preferential sputtering on the surface of the W Mo alloy source under the argon ion bombardment; the stable period is reached after a transitional period, and the preferential sputtering occurs in a definite range of composition(mole fraction): 70%～75% Mo, 22%～25% W; there appears segregation on the surface of the W Mo alloy source.

The distribution of plasma density in the vicinity of the W-Mo alloy source in the:process of double-glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface composition and morphological variation of the W-Mo alloy source was studied. The experimental results show that there exists obvious preferential sputtering on the surface of the W-Mo alloy source under the argon ion bombardment; the stable period is reached after a transitional period, and the preferential sputtering occurs in a definite range of composition(mole fraction): 70 % similar to 75 % Mo, 22 % similar to 25 % W; there appears segregation on the surface of the W-Mo alloy source.