Co/C 软X射线多层膜镜的界面化学态(英文)

INTERFACIAL BONDING IN AS DEPOSITED AND ANNEALED Co/C SOFT X RAY MULTILAYER MIRRORS 

以Ｘ射线光电子谱（ＸＰＳ）为手段，研究了制备态和退火Ｃｏ／Ｃ软Ｘ射线多层膜镜的界面化学态．研究表明，在制备态的Ｃｏ／Ｃ软Ｘ射线多层膜的界面处存在互扩散，并为低角Ｘ射线衍射（ＬＡＸＤ）所证实．基于Ｍｉｅｄｅｍａ的“宏观原子”原子模型计算了Ｃｏ－Ｃ系统中Ｃｏ的化学位移，发现Ｃｏ的化学位移低于ＸＰＳ的能量分辨率，因此使用ＸＰＳ不可能通过实验探测到Ｃｏ－Ｃ系统中Ｃｏ的化学位移．通过分析退火样品中Ｃｏ－Ｃ和Ｃ－Ｃｏ界面上Ｃ的化学态，发现界面处存在金属碳化物．研究还表明，ＸＰＳ是研究多层膜界面化学态直观而有效的实验方法．

Interfacial bonding in as deposited and annealed Co/C soft X ray multilayer structures is investigated by X ray photo electron spectroscopy (XPS).It is found that there is interdiffusion between cobalt and carbon in the as deposited Co/C multilayers,and this is confirmed by structure characterization using low angle X ray diffraction (LAXD).The calculation of the chemical shifts in Co C system based on Miedemas macroscopic atom model suggests that it is impossible to detect the chemical shift experimentally in the Co C compound,which is consistent with the XPS results.The presence of metallic carbide bonding is evidenced through the nature of the carbon bonding in survey taken at Co C and C Co interfaces of annealed samples.Our results also indicate that XPS is a direct method to probe the chemical bonding at the interfaces.