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Characterization of Low Pressure RF Plasma Heating 被引量:2

Characterization of Low Pressure RF Plasma Heating
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摘要 Compacts of a-Al2O3 and Mo powder were heated in radio-frequency (RF) induced low pressure N2, H2,Ar, and their mixture plasma. An optical pyrometer, a radiation pyrometer, and a system called Accufiber Model310 were used to measure the temperature of compacts heated in the plasma. The results indicate that there are different heat transfer mechanisms from plasma to specimens of different physical properties. The Ar plasma showed thehighest heating ability among N2, H2, and Ar plasma for Al2O3 specimens, whereas the H2 plasma could heat Mospecimens to a higher temperature than the Ar plasma did, even under the same generating conditions. Compacts of a-Al2O3 and Mo powder were heated in radio-frequency (RF) induced low pressure N2, H2,Ar, and their mixture plasma. An optical pyrometer, a radiation pyrometer, and a system called Accufiber Model310 were used to measure the temperature of compacts heated in the plasma. The results indicate that there are different heat transfer mechanisms from plasma to specimens of different physical properties. The Ar plasma showed thehighest heating ability among N2, H2, and Ar plasma for Al2O3 specimens, whereas the H2 plasma could heat Mospecimens to a higher temperature than the Ar plasma did, even under the same generating conditions.
出处 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1998年第1期31-35,共5页 矿物冶金与材料学报(英文版)
关键词 plasma heating temperature measurement heat transfer mechanism plasma heating, temperature measurement, heat transfer mechanism
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