摘要
icrostructures of two Yba_2Cu_3O_(7-y) (YBCO) film deposited on metal substrate (HastelloyC) with yttriastabilized zirconia (YSZ) buffer layer were studied comparatively. Relation of microstructure with deposition condition was also been discussed. The YSZ buffer layer with a low depositing rate is dense, even, textured and wellbonded to the substrate. On the contrary, the YSZ layer deposited with a high rate is loose and bonded badly to the substrate. Property and surface grain size of YBCO film are related to the substrate temperature (Ts) in the deposition process.
オicrostructures of two YBa_2Cu_3O_(7-y) (YBCO) film deposited on metal substrate (HastelloyC) with yttriastabilized zirconia (YSZ) buffer layer were studied comparatively. Relation of microstructure with deposition condition was also been discussed. The YSZ buffer layer with a low depositing rate is dense, even, textured and wellbonded to the substrate. On the contrary, the YSZ layer deposited with a high rate is loose and bonded badly to the substrate. Property and surface grain size of YBCO film are related to the substrate temperature (Ts) in the deposition process.
