Aging effect of Co/C soft X-ray multilayer mirrors BAI Haili, JIANG Enyong, TIAN Renyu and WANG Cunda
Aging effect of Co/C soft X-ray multilayer mirrors BAI Haili, JIANG Enyong, TIAN Renyu and WANG Cunda
摘要
MULTILAYER X-ray mirrors are of one-dimensional period structures consisting of alternating layers of materials of high- and low-refractive index. In the applications of soft X-ray multilayer mirrors, such as microscopy, astronomy and microlithography, high reflectivity is so important that it is necessary to know if the multilayers in use show aging effects, e.g. reflectivity changing with time. In this study, the aging effects of Co/C multilayers are investigated,
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