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Periodic surface structures fabricated by one excimer laser pulse through a silica phase mask grating

Periodic surface structures fabricated by one excimer laser pulse through a silica phase mask grating
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摘要 RECENTLY, excimer laser devices, which have higher-energy density output in pulsed ultravio-let (UV) light (193 or 248 nm), have been employed to generate some thin film struc-tures. The principle of this technique, which is also called pulsed laser deposition (PLD)technique, is that the exposed material could be ablated out of the sample by the focusing laserbeam, and redeposit on a substrate to form thin-film structures under certain conditions. Onthe other hand, researchers have obtained high-quality Bragg gratings in photosensitive
机构地区 Nanjing Univ
出处 《Chinese Science Bulletin》 SCIE EI CAS 1997年第21期1787-1792,共6页
关键词 EXCIMER laser pulse phase MASK GRATING PERIODIC surface structures. excimer laser pulse phase mask grating periodic surface structures
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