液浮惯性元件的真空检漏和真空充液

The Leak Hunting and Fluid Filling Technique in Vacuum for Floated Inertial Sensors

本文叙述了真空检漏和真空充液对液浮惯性元件的重要作用；分析了惯性元件出现漏油和气泡的诸多原因及其对惯性元件性能的影响；介绍并讨论了提高真空检漏和真空充液质量必须解决的工艺关键问题。通过实践指出了在液浮惯性元件真空充液过程中易入的一般误区，提出了一种行之有效的新的改进真空充液工艺的途径。

This paper has three objectives:introduce the importance of the leak hunting and fluid filling technique in vacuum for floated inertial sensorsj ; analyze the reasons why there appear oil leaking and air bubbles in floated inertial sensors and the impact of oil leaking and air bubbles on floated inertial sensors,and discuss some key problems in the technique that should be solved to improve the quality in leak hunting and fluid filling in vacuum. In this paper , the author ,basing on her own working practice , points out some mistakes which can be made easily in the course of fluid filling in vacuum for floated inertial sensors and suggests an effective new way to improve the fluid filling technique in vacuum.