Measurement　of　Concentration　Distribution　of　Electrogenerated　Etchant　Using　an　Electrochemical　Probe　Technique

Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique

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摘要 An electrochemical probe measurement system for detecting an electrogenerated etchant in solution is developed.Concentration distribution of electrogenerated etchant bromine as close as 8 micrometer to the surface of macrodisk is studied quantitatively. An electrochemical probe measurement system for detecting an electrogenerated etchant in solution is developed.Concentration distribution of electrogenerated etchant bromine as close as 8 micrometer to the surface of macrodisk is studied quantitatively.

作者 Lian Yong SU Jin LUO Zhong Hua LIN Zhao Wu TIAN(National Lab of Molecular and Biomolecular Electronics,Southeast University,Nanjing 210018)(State Key Lab for Physical Chemistry of Solid Surfaces,Department of Chemistry,Xiamen University 361005)

出处《Chinese Chemical Letters》 SCIE CAS CSCD 1996年第9期835-836,共2页 中国化学快报（英文版）

关键词 MEASUREMENT ELECTROCHEMICAL PROBE TECHNIQUE CONCENTRATION DISTRIBUTION

分类号 O657.1 [理学—分析化学]

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1Lian Yong SU,Jin LUO,Zhong Hua LIN,Zhao Wu TIAN (The State Key Laboratory for Physical Chemistry of the Solid Surface,Xiamen University,Xiamen 361005).STUDIES　ON　HOMOGENEOUS　SCAVENG　REACTION　IN　　CONFINED　ETCHANT　LAYER　TECHNIQUE　FOR　NANOLITHOGRAPHY　（I）　──As　（III）　SCAVENGING　BROMINE　REACTION[J].Chinese Chemical Letters,1995,6(3):243-246.

Chinese Chemical Letters

1996年第9期

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Measurement　of　Concentration　Distribution　of　Electrogenerated　Etchant　Using　an　Electrochemical　Probe　Technique

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