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Fatigue characteristics of ferroelectric (Pb_(0.925)La_(0.075))-(Zr_(0.65)Ti_(0.35))_(0.981)O_3 thin films

Fatigue characteristics of ferroelectric (Pb_(0.925)La_(0.075))-(Zr_(0.65)Ti_(0.35))_(0.981)O_3 thin films
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摘要 Due to the applications in electronics and optics in the past two decades, ferroelectricthin films (BaTiO<sub>3</sub>, PbTiO<sub>3</sub>, (Pb<sub>1-x</sub>La<sub>x</sub>)(Zr<sub>y</sub>Ti<sub>1-y</sub>)O<sub>3</sub>(PLZT x/y/1-y), LiNbO<sub>3</sub>, Bi<sub>4</sub>Ti<sub>3</sub>O<sub>12</sub>,etc.)have been widely investigated. Especially, ferroelectric thin film memory, combining the ad-vantage of semiconductor memory with that of magnetic memory, has properties including highspeed, high density, nonvolatility and good radiation hardness, and can be compatible
出处 《Chinese Science Bulletin》 SCIE EI CAS 1995年第9期784-787,共4页
基金 Project supported by the National 863 High Technology Program of China.
关键词 FERROELECTRIC THIN film FATIGUE CHARACTERISTICS rf MAGNETRON sputtering. ferroelectric thin film, fatigue characteristics, rf magnetron sputtering.
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