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VAPOUR PHASE METHOD FOR DIAMOND THIN FILM GROWTH

VAPOUR PHASE METHOD FOR DIAMOND THIN FILM GROWTH
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摘要 Diamond has extreme hardness and is a new type of multi-function material which has excellent electrical, optical, thermal and mechanical properties.Russian scientists Derjaguin et al. successfully synthesized diamond on nondiamond substrates by chemical transport reaction method in 1976. In 1982, Japanese sci-
出处 《Chinese Science Bulletin》 SCIE EI CAS 1990年第12期988-991,共4页
关键词 DIAMOND THIN film HOT FILAMENT CVD crystal feature. diamond thin film,hot filament CVD,crystal feature.
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