智能化非接触精密二维光电测量系统的研究

TWO-DIMENSIONAL INTELLIGlENT PHOTOELECTRICAL MEASUREMENT SYSTEM OF NONCONTACT

本文以不规则轮廓与各种角度的测量为目的,进行了智能化非接触精密二维光电测量系统的研究,提出采用线阵CCD器件、计量园光栅、步进电机与个人计算机构成系统.系统采用最小二乘拟合莫尔条纹信号细分法提高光栅角位移测量精度,采用解调细分法提高OCD测失径的精度,论文给出了理论分析与相应的实验结果。

This paper introduces a two-dimensional intelligent measurement system of noneontaet and high precision. The system consists of a circular grating, a CCD, a step motor and a microcompuler, In order to increase the accuracy of measuring angles, the method of the least squares is used to fit the Motter streaks and fine divide it by the ratculated phase difference. For the purpose of raising measuring accuracy the demodulation fine division method is used. This paper introduce the experimental results.