摘要
本文介绍了在适当改装后的长刻线机上,采用刀刻与光刻相配合的方法,制作高精度直线感应同步器母版的工艺过程,并讨论了影响母版精度的有关因素。
The technological process of making high precision linear inductosyn masks plate by means of the coordiation of tool-engraving and photo-engraving on a properly refitted long dividing machine has been introduced jn this paper. The relevant factors affecting the precision of the masks plate have also been dealt with.
出处
《长春理工大学学报(自然科学版)》
1990年第1期54-58,共5页
Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词
光刻
感应同步器
母版
photo-engraving
inductosyn
masks plate