摘要
IMS-3f的线扫描功能,常用于样品表面较大范围内元素分布的检测。若将样品处理,例如切开、磨角,就可以用元素在表面分布的检测代替在体内分布的检测,因此可以解决元素深度分布剖析中的一些问题。
The 'LINE-SCAN' function of IMS-3f SIMS is used to detect elements distribution on the sampl esurface. Treating with ways on the sample such as cutopening, anglelapping, the distribution of elements in the body can be replaced by distribution on the surface. So we can overcome some problems in depth profiling.
出处
《质谱学报》
EI
CAS
CSCD
1989年第1期24-27,共4页
Journal of Chinese Mass Spectrometry Society
