摘要
In a capacitively coupled RF discharge system with external electrodes ,hexamethyicyclotrisiloxane was polymerized, and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy, XPS measurement, PGC/MS combined technique, TG analysis and contact angle measuring. The results showed that the polymers prepared in H_2 or O_2 have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.
In a capacitively coupled RF discharge system with external electrodes ,hexamethyicyclotrisiloxane was polymerized, and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy, XPS measurement, PGC/MS combined technique, TG analysis and contact angle measuring. The results showed that the polymers prepared in H_2 or O_2 have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.
基金
The project is supported by the National Natural Science Foundation of PRC
