用金属有机溶液和浸渍法制备SiO_2和TiO_2光学薄膜

PREPARATION OF SI02 AND Ti02 OPTICAL FILMS BY DIPPING--LIFTING PROCESS FROM METAL ORGANIC SOLUTION

采用TiO_2和SiO_2的金属烃氧基在乙醇溶液中进行水解反应,制成胶状非晶态物质溶液.用浸渍法在玻璃基底上制备出多层TiO_2/SiO_2介质复合膜.它具有涂膜设备和工艺简单,成本低等特点.作者对溶液配制、涂膜工艺和膜的结构进行了初步研究.由实验得出膜厚d与溶液浓度C及提拉速度V的关系;给出了膜厚随其热处理温度的变化;并用扫描电镜对膜的表面结构进行了分析.

The colloidal coating solution of amorphous state was prepared via metal alkoxides of TiO2 and SiO2 producing hydrolysis in alcoholic solution. Then by dipping process TiO2/SiO2 dielectric multi-films were deposited from the solution. The advantege of the method is low production cost and simple film-coating epuipment and technology. The solution prepareing coating technology and the structure of the films were studied. The relation of the thickness of films vs concentration of solutions and lifting speeds were presented in compliance with the experimental results. The change of film thickness with baking temperature was described, and the surface structure of the films with -SEM was also analysed.