镉在磷化铟中扩散的研究

Investigation of the Diffusion of Cd into Inp

我们采用CdP_2作为扩散源,进行真空闭管扩散,对Cd在InP单晶中的扩散行为作了研究,给出了结深与扩散时间的关系曲线,扩散结深与源量的关系,扩散速率与温度的关系,计算了激活能△E。实验获得了保持InP单晶表面在扩散后具有良好镜面的工艺水平,得到了可精确控制的扩散结深,极其平坦而鲜明的扩散结前,扩散重复性好。文章对实验中出现的与菲克定律不符的部分给予了定性解释。

The diffusion of Cd into InP was investigated with vacuum closed ampoule using a combinetion source composed of CdP_2 and InP chunks. Some useful figures (xj---t^(1/2), xj t^(1/xj)---T)were given out. The activated energy △E was calculated. The experimental results were satisfactory.