用光学扫描器构成的新型精密位移测量系统

A New Precision Displaement Measuring System With Opto-scanner

本文研究由位移传感用的光学扫描器、简单光学系统、栅距很大的粗线纹反射式光栅尺(λ=0.635mm)和信号处理电路等构成的新型精密位移测量系统。对光学扫描器作了简要介绍。阐述了该系统的工作原理、电路框图和动态鉴相细分电路。实验结果表明,本系统测量误差小于±0.01mm,分辨率为lμm。与国内现有位移测量系统相比,新系统具有工作间隙特别大(15mm左右),光栅尺不用密封,耐现场污染,容易在车间推广使用等优点。

A new precision displacement measuring system is introduced in this paper. The system consists of an optoscanner used as a displacement sensor a simple optical system, a large pitch 'reflecting coarse grating (A=0.635 mm), signal processing circuits and etc. After describing the opto-scanner briefly, the paper expounds the principle of the new system, the schematic circuits and the theory of dynamic phase discriminating and subdivision circuits. Experiment results indicate that the measuring error of the system is less than 0.01mm with a resolution of 1m. Compared with other present displacement measuring systems in China, the main advantages of the new system are us follows extremely large working interval (about 15mm) , without sealing of the grating, satisying antipollution-ability in workshop condition, and convenience when used in workshop.