摘要
以MEMS微变形镜驱动方式的选取为出发点,从光学特性和力学特性两方面对MEMS微变形镜进行分析,从中得出相关结构参数对微变形镜性能的影响关系,并在此基础上结合补偿激光二极管抽运固体激光器(DPL)热畸变的使用要求设计了一种新型MEMS连续面型微变形镜,并采用设计的MEMS变形镜搭建了一个闭环自适应光学实验系统,补偿了激光光束的热畸变。实验结果显示该MEMS连续面型微变形镜可对腔内畸变进行有效补偿,同时提高了激光器的输出功率及光束质量。
The drive mode of MEMS deformable micro-mirror is initially selected. Based on theoretical analysis of optics and mechanics characteristics of MEMS deformable micro-mirror, the relation between correlation structure parameter and performance of deformable mirror is obtained according to the requirements which compensate thermally induced aberration of laser diode. Pumped solid-state laser, a novel electrostatic actuated deformable micro- mirror with continuous facet is designed. It is used to set up a closed-loop control adaptive optics system, which has compensated thermally induced aberration of laser beam. The experimental result shows the intra-cavity aberration was effectively compensated and the output power and beam quality were improved by the novel MEMS deformable micro-mirror.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2009年第4期853-858,共6页
Acta Optica Sinica
基金
国家自然科学基金(10476010)资助项目
关键词
自适应光学
微变形镜
激光热畸变
光束质量
adaptive optics
deformable micro-mirror
thermally induced aberration
beam quality
