摘要
介绍在可见光范围内,在玻璃基底上制备铝膜,保护膜采用高反介质膜堆。采用离子辅助手段,使其反射率在450nm～750nm波长范围内提高到95%左右。同时讨论了膜料的选择、膜系的设计、工艺参数的优化及基片清洗等问题。
In the range of visible spectrum, we prepare aluminum coating on glass substrate and then add high reflective dielectric film stack as protection film. With the aid of ion source, the average reflectance increases to approximately 95% in the wavelength range from 450nm to 750nm. In addition, cboosing coating materials, designing coating system, optimizing manufacturing parameters and cleaning the surface of substrate are also discussed.
出处
《长春理工大学学报（自然科学版）》
2009年第1期57-59,共3页
Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词
镀铝
介质膜
离子辅助
coating aluminum film
dielectric film
ion assisted deposition （IAD）
