摘要
叙述用迈克尔逊干涉仪测量薄膜厚度的原理，提出一种检测透明薄膜的新方法．它适合用来测定各种单片透明薄膜的厚度．
The priciple and method of measuring the thickness of thin films by using the Michelson interferometer are described.The results showed that this method is suitable for the detemination of kinds of transparent film thickness.
出处
《武汉化工学院学报》
1998年第1期79-81,共3页
Journal of Wuhan Institute of Chemical Technology
关键词
干涉条纹
薄膜厚度
厚度测量
interference fring
film thickness
thickness measurement
