R电容式硅微加速度传感器静态误差的标定

Static Error Calibration of Micro-Machined Capacitance Accelerometer

静态误差广泛存在于各种加速度传感器的应用中,对于误差的标定非常重要。本文介绍了电容式加速度传感器的结构,并分析其工作原理。对于加速度传感器的量程,采用精密离心机来标定静态误差,具体介绍了离心机实验过程,成功地实现了对加速度传感器静态误差的标定,并给出了电容式加速度传感器的标定数据和结果,标定结果使加速度传感器测量的线性度得到了很大的提高。标定方法也适用于其他类型加速度传感器。

Static error is widely existed in all kinds of micro accelerometer application. The calibration of static error is very important. This paper introduced the structure and principle of the design capacitance micro - accelerometer. For the measurement range of the accelerometer, the centrifuge was chosen to calibrate the static error. With the description of calibration theory and process, the calibration for designing silicon micro - acceler- ometer was finished. The calibration result showed＇ that the linear scale is O. 31%, which can satisfy the design requirement. The calibration method can also be used for other micro - accelerometers.