摘要
提出一种基于压电陶瓷管扫描器的X-Y二维大范围纳米级定位系统,该系统利用摩擦力和惯性使样品产生步进式的微位移。阐述了该系统的设计和工作原理,并给出了它在原子力显微镜中用于探针-样品间的定位控制的应用实例,取得了理想效果。
A X -Y dimensions nano-positioning thesis, which utilized friction and inertia to drive the principle were introduced in detail, and an example some satisfactory results were obtained. system with large-scale based on PZT scanner was presented in this sample for micro-and nano-step movement. The design and work of its experiments in Atomic Force Microscopy was shown. And
出处
《仪表技术》
2009年第4期39-41,共3页
Instrumentation Technology
基金
上海科委资助项目(0852nm06800)
关键词
样品移动平台
摩擦力和惯性
原子力显微镜
定位控制
sample movement stage
friction and inertia
atomic force microscopy
positioning control
