摘要
提出了一种光学8倍频的耦合差动式干涉光路,其结构设计简洁紧凑,光路布局对称性好,光程差倍增,符合阿贝原则和结构变形最小原则。对系统精度在理论分析的基础上进行了估算,得出了在10mm范围内干涉仪综合精度的理论值约为±1.8 nm。采用与电容测微仪比对的方法对该系统进行检测,利用线性回归的方法对测量结果进行处理。试验结果表明:该干涉测量系统的精度约为14 nm。
A new laser interferometric system with nanometric accuracy is developed. Optical system with 8 times optical path difference is designed. The following materials and methods are utilized：simple, stable and compact optical layout;coupled defferential interferometry;symmetrical optical paths;multiplication optical path difference; Abbe principle. The accuracy of the system is analyzed and the result is about ± 1.8 nm within the range of 10 mm. The test is given by comparing with the capacitive micrometer. Experiment results show that the measuring accuracy is about 14 nm.
出处
《传感器与微系统》
CSCD
北大核心
2009年第4期50-53,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(50105016)
关键词
激光干涉
耦合差动
误差分析
纳米精度
laser interferometer
coupled different
error analysis
nanao accuracy
