研磨表面微观形貌的三维检测及Areal表征

Research on the 3-D Detection and Areal Characterization of Micro-topography of Lapping Surface

介绍了三维表面微观形貌的检测方法,分析了采用高斯滤波提取基准中面的原理,针对研磨表面形貌的表征选取了一组Areal表征参数。运用原子力显微镜(AFM)扫描研磨工件的表面,采用高斯滤波提取基准中面进而分离出表面微观形貌的三维信息,在此基础上计算出表征参数值。试验表明研磨表面微观形貌呈现高斯分布规律,采用高斯滤波方法及所选的Areal表征参数能够有效地表征研磨表面的三维微观形貌。

This paper introduces the precisely detecting method of 3-D surface＇ s micro-topography. The Gaussian filter method for extracting reference plane is analyzed, and a collection of Areal parameters is selected to characterize the lapping surface topography. The atomic force microscope（AFM） is used to scan the lapping surface, and the reference plane is extracted by Gaussian filter so as to divide the surface micro-topography information, then the characterization parameters＇ value are calculated. The experiment shows that the lapping surface＇s micro-topography takes on a Gaussian distribution, and applying Gaussian filter method and the selected Areal parameters can effectively assess the 3-D micro-lapping surface.