钛酸锶薄膜的液相自组装制备与表征

Preparation and Characterization of SrTiO_3 Thin Film with Self-assembled Monolayers Technique in Liquid Phase

采用自组装单层膜技术在玻璃基板上成功制备了钛酸锶薄膜,利用接触角仪对前期处理后的基片润湿角进行表征,利用X射线衍射(XRD),扫描电镜(SEM)等手段表征了薄膜的物相和微观结构。实验结果表明:采用自组装单层膜技术制备的钛酸锶薄膜结晶良好,样品表面均匀,颗粒尺寸大约在300nm～500nm之间。

SrTiO3 thin film was successfully prepared on glass wafers with self-assembled monolayers technique. Contact angle of glass wafers treated before deposition was studied, the phase and microstructure of SrTiO3 sample were characterized and analyzed by XRD and SEM. The results indicate that SrTiO3 thin film prepared by self-assembled monolayers technique was crystal and homogeneous, the size of the particle ranged from 300nm to 500nm.