摘要
本文论述了利用阻尼最小二乘法对给定的电子光学静电透镜模型进行优化设计。目是在不引入校正设备的前提下，只通过改进设计方法，而使静电透镜的固有象差实现尽可能低的可行性，并提出了计算象差系数的新方法。
The damped square method is used for optimizing the electrostatic lens in this paper. Without introducing the adjusting equipment, the possibility of decreasing the aberration by structure optimization of electrostatic lens is discussed. A new method to calculate the aberration coefficients is proposed.
出处
《电子器件》
CAS
1998年第2期118-123,共6页
Chinese Journal of Electron Devices
