摘要
建立桥模式RF MEMS开关的非线性振动微分方程,充分考虑由微加工工艺产生的残余应力的影响。给出Runge-Kutta方法求解流程图,并进行实例计算。计算结果与相关文献吻合。
A nonlinear vibration differential equation is established for RF MEMS switch. The residual stress induced by micro-fabrication is considered. Runge-Kutta method is used to solve the ferential equation. The numerical solution is in accordance with the result in a relevant reference.
出处
《噪声与振动控制》
CSCD
北大核心
2009年第2期97-98,共2页
Noise and Vibration Control
基金
上海市教委科研资助项目(06EZ018)
