摘要
纳米科学技术是８０年代后期发展起来面向２１世纪的高新技术，纳米加工技术是制造量子微结构的主导技术。电子束纳米加工推动着微细加工技术的研究向着分子、原子量级的纳米层次发展。本文重点介绍电子束纳米曝光技术的研究现状及发展前景。
In the late eighties the nanoscale science and technology is developed high technology towards 21th century. The nanofabrication is the most important technology for fabrication of quantum microsturture. Electron beam nono lithography is pushing microfabrication research towards molecular and atomic scales.The current research and the developing future for electron beam nanolithography are introduced in the paper.
出处
《微细加工技术》
1998年第2期1-9,共9页
Microfabrication Technology
