聚氯代对二甲苯膜的退火处理及热氧老化研究

Anneal Treatment and Thermal Oxidation Aging Study of Poly(chloro-para-xylylene) Films

采用化学气相沉积法制备聚氯代对二甲苯(PPXC)膜,并对其在氩气和空气2种气氛中进行退火处理,研究退火前后PPXC膜的微观结构、拉伸强度及水汽渗透率变化。结果表明,PPXC膜在2种气氛下恒温退火,聚合物的结构变化存在2个过程,结晶完善过程与降解过程,在大气中氧的存在增大了降解程度。PPXC膜的拉伸强度随退火时间先增大、后减小,而水汽渗透速率则随退火时间先减小、后增大。且在氩气气氛中,PPXC膜所达到的力学性能、水汽阻隔性能更佳。

Poly（chloro-para-xylylene） films were prepared through chemical vapor deposition method, which were annealed at the atmospheres of argon and air. The microstructure, tensile strength, moisture permeation rate of the films were analyzed . The results show that two obvious stages can be inferred for the whole annealing process. The first is the process of crystallization, and the second is the process of thermal degradation. The oxygen accelerates degradation process of the films. The tensile strength increases with the anneal time firstly, then decreases, however, the moisture permeation rate decreases firstly, then increases. The favorable mechanical and moistureproof properties of the films can be gained after annealing in the atmosphere of argon.