摘要
为了满足微电子机械系统的飞速发展,探讨了一种程序简单、计算成本较低的微尺度流动数值模拟新方法-广义微分积分方法。研究工作根据微尺度库埃特流动特点对N-S方程加以改进,建立起相应的理论模型,采用这个模型流动模拟能拓宽到滑移流动区和过渡流动区。然后采用广义微分积分方法来进行流场数值模拟,并用蒙特卡洛直接模拟方法(DSMC)加以验证,结果表明利用新建理论模型的模拟结果与验证结果基本吻合,但是也发现随着努森数的增加两者的误差增加,表明新建理论模型还有必要进一步完善。
In order to meet the rapid development of Micro Electro-Mechanical System（MEMS）, a kind of new numerical simulation method named generalized differential quadrature （GDQ） is mainly explored. Its dominant characteristic consists in simple program and low calculation cost. Aiming at micro-scale Couette flow system, the corresponding theoretical model has been built based on improved N-S Equation. This new model can been extended to simulate the flow in slipping region and transition region. Then applying GDQ method, the numerical simulation of flow field is made. And using the direct simulation of Monte Carlo approach （DSMC）, the new model is verified. The solutions show that the simulation results of the new model are basically consistent with the DSMC＇s. But the error is becoming more and more large with the increase of Kn number. So this indicates that it is indispensable to amend the new model in the later.
出处
《能源技术》
2009年第2期77-79,83,共4页
Energy Technology
关键词
微电子机械系统
库埃特流动
广义微分积分方法
蒙特卡罗直接模拟法
micro electro-mechanical system
couette flow
generalized differential quadrature method
direct simulation of monte carlo approach
