荧光法表征沉积在硅片上的金图形

Fluorescent Method of Characterizing Images of Gold Patterns Deposited on Silicon Chip

利用硅片上的金表面形成半胱胺自组装膜,并在半胱胺膜上接上荧光物质异硫氰酸荧光素,用落射荧光显微镜及电子倍增电荷耦合器件间接表征沉积在硅片上的各种金图形.该方法简便,灵敏度高,表征出的金图形清晰,最小直径为5-7μm.

In the experiment, self-assembled monolayer could be formed through the adsorption of cysteamine on gold surface on silicon chip. Then the localizations of gold micro patterns on the silicon surface could be characterized by epifluorescence microscope and electron multiplying charge coupled device after cysteamine monolayer was tagged with fluorescein isothiocyanate. The least diameter size of gold micro patterns were 5-7 μm and the image results were clear and with high sensitivity. This method is very simple and easy to be used.