固着磨料加工碳化硅反射镜的实验

Experiment of grinding SiC mirror with fixed abrasive

考虑固着磨料加工工艺其固着磨料与工件相对运动关系固定,有利于精确加工,提出了采用该工艺加工碳化硅反射镜的方法,利用大颗粒金刚石磨料快速加工出了较好的镜面质量。在工艺实验中,分别测得了W7,W5,W3.5,W1.5固着磨料丸片在特定转速和压力下对碳化硅材料的去除特性。对多组去除量曲线的分析表明,此工艺不仅有着较高的去除率,而且稳定性良好。对表面粗糙度测量的结果表明,使用W7丸片即可获得粗糙度为42.758 nm rms的镜面。减小所用丸片的粒度,工件表面粗糙度随之减小,使用W1.5丸片抛光后,最终获得了粗糙度为1.591 nm rms的光滑镜面。实验结果表明,固着磨料加工碳化硅反射镜工艺在粗研、精研、粗抛等加工阶段内可以取代传统的散粒磨料加工工艺。

A new technique called fixed abrasive surfacing technique is presented for manufacturing SiC reflecting mirrors,and a mirror with good quality is obtained by grinding with bigger diamond abrasives at a high speed and the fixed motion between abrasives and workpieces. The material removal characteristics on the SiC are measured at certain rotation speed and pressure by W7, W5, W3.5, W1. 5 pellets, and the removal characteristic curves obtained by above experiments show that this method can offer a higher removal rate and stability for the mirror manufacturing. In addition,a surface roughness experiment is undertaken,and the results indicate that a surface roughness of 42. 758 nm rms can be obtained by W7 pellets. The experiment also indicates that the surface roughness is decrease with changing pellets in a smaller diamond diameter. At the end of the experiment, a smooth surface in a roughness of 1. 591 nm rms is gotten after using W1. 5 pellets. These results conmonstrate that the proposed technique for manufacturing SiC reflecting mirrors with fixed abrasives is able to replace the traditional manufacturing technology with slurry abrasives completely in certain finishing phases.