微细阵列孔的电解加工精度研究

Research on EMM Precision of Micro-hole Array

从电解加工的特点出发,对影响微细阵列孔加工精度的因素进行了分析。电解加工过程中,工具阴极和工件阳极之间存在加工间隙是导致误差的根源。微细阵列孔的电解加工误差可分为复制误差和重复误差,电场强度的分布状态和杂散腐蚀是造成复制误差的最重要因素,而气泡在加工区域的堆积导致了重复误差的产生。通过理论和实验分析,为实验加工提供了提高加工精度的措施和办法。

In this paper, according to the characteristics of electrochemical micromachining （EMM）, the impact factors of micro-hole array machining precision are analyzed. In process of EMM, gap between tool and workpiece cathode anode is the root cause leading to the error. EMM er- ror of Micro-hole array can be divided into duplicatio error and repeated error, the distribution of elec- tric field strength and spurious corrosion are the most important causation of copying error, while the accumulation of air bubbles in the processing region led to the emergence of repeated error. Through theo- retical and experimental analysis, measures and methods are provides to improve machining accuracy.