摘要
提出一种标定Hartmann-Shack波前传感器结构参量的新方法,通过基于Zernike多项式的模式复原算法推导出公式,结合实验手段获得相应数据,处理后得到微透镜阵列到CCD之间的距离.该方法有效改善了以微透镜焦距代替实际参量计算斜率引入较大误差的状况,在降低传感器装配准确度要求的同时,提高了Hartmann-Shack波前传感器的探测准确度.经实验验证该方法在一般实验条件下即可获得满意效果.
A new method is proposed to measure the parameter of Hartmann-Shack wavefront sensor. It was based on the Zernike polynomial modal reconstruction algorithm, and can be used to obtain the distance between micro-lens array and the CCD accurately. It obviously reduces the error caused by the slope calculation using micro-lens focus instead of actual parameter. Through this way,the requirement of sensor assembly-precision is reduced,and the detection accuracy of Hartmann-Shack sensor is also improved in the meanwhile. Satisfying results has been achieved under the normal experimental condition using the method given in.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2009年第4期780-784,共5页
Acta Photonica Sinica
基金
国家863计划(2006AA020804)资助
