摘要
An integrated optical waveguide resonator based on a SiO2 waveguide is proposed, fabricated and tested. The method of designing the resonator is also presented. The optimal splitting ratio of the coupler is gained by simulating the relationship between the splitting ratio of the key coupler in the resonator and the resonator＇s finesse with resonance depth. The calculated fundamental detection limit of this integrated optical vcaveguide resonator is 1.6°/h. Finally, a micro-optical gyroscope system based on the integrated waveguide resonator is built, and the measured resonator＇s finesse F is close to 70 under fluctuating temperature. To the best of our knowledge, the present F is the best result to date. For the coupler splitting rate the experimental results have fixed errors with the simulation results caused by fabrication processes which can be easily eliminated, implying that the method of design is effective and applicable.
An integrated optical waveguide resonator based on a SiO2 waveguide is proposed, fabricated and tested. The method of designing the resonator is also presented. The optimal splitting ratio of the coupler is gained by simulating the relationship between the splitting ratio of the key coupler in the resonator and the resonator＇s finesse with resonance depth. The calculated fundamental detection limit of this integrated optical vcaveguide resonator is 1.6°/h. Finally, a micro-optical gyroscope system based on the integrated waveguide resonator is built, and the measured resonator＇s finesse F is close to 70 under fluctuating temperature. To the best of our knowledge, the present F is the best result to date. For the coupler splitting rate the experimental results have fixed errors with the simulation results caused by fabrication processes which can be easily eliminated, implying that the method of design is effective and applicable.
基金
Supported by the National Natural Science Foundation of China under Grant No 50875015.
