激光诱导化学气相合成纳米陶瓷微粉设备的研制

Development of Equipment for Ceramic Nanometer Powder Production by Laser Induced Chemical Vapour Synthesis

本文重点介绍了采用激光诱导化学气相合成方法制备ＳｉＣ纳米陶瓷微粉的制粉原理和特点，以及为此项课题专门研制的制粉设备的结构及操作工艺。

Abstract In this paper, the principle and characteristics of producing SiC ceramic nanometer powder by laser induced chemical vapour synthesis are introduced. The constructure and operation process of the equipment for this subject are given.